The influence of hydrogen and argon pressure on composition and optoelectronic properties of sputtered a-Si1−xGex:H (x ≈ 0.4)
- 1 May 1993
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 155 (3) , 195-208
- https://doi.org/10.1016/0022-3093(93)91254-z
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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