Analysis of high resolution electron microscope images of the Pd2Si-Si interface
- 1 July 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 93 (1-2) , 109-125
- https://doi.org/10.1016/0040-6090(82)90096-7
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Transmission electron microscopy of cross sections of large scale integrated circuitsIEEE Transactions on Electron Devices, 1976
- Structure and electrical characteristics of epitaxial palladium silicide contacts on single crystal silicon and diffused P-N diodesSolid-State Electronics, 1972