Adhesion measurement of metal films on a Si(111) surface by a microtribometer
- 1 January 1988
- journal article
- Published by Taylor & Francis in Journal of Adhesion Science and Technology
- Vol. 2 (1) , 1-10
- https://doi.org/10.1163/156856188x00011
Abstract
An adhesion test device (microtribometer) based on the vibration of and scratching by a diamond stylus is interpreted in detail. The device is applied to the adhesion measurement of several metal films on Si(111) surfaces, and the measured adhesion forces ranged in the GPa region. The force applied through the stylus is assumed to act as the internal stress in films and to store the elastic energy in the films. The accumulation of this elastic energy was considered to induce the scratch peeling, and the adhesion energy was evaluated from the elastic energy. The adhesion energies thus determined were comparable with the values predicted from the surface free energies of the film and the substrate.Keywords
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