Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
- 1 August 2000
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 68 (1-3) , 128-133
- https://doi.org/10.1016/s0925-4005(00)00472-x
Abstract
No abstract availableKeywords
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