High Dose Implantation of Nitrogen and Phosphor into Silica Glass
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Low-loss integrated optical waveguides fabricated by nitrogen ion implantationApplied Physics Letters, 1983
- Properties of ion implanted glassesNuclear Instruments and Methods in Physics Research, 1983
- Changes of the surface composition of glass during reactive and argon ion etchingRadiation Effects, 1983
- Effect of nitrogen ion-implantation on silicate glassesJournal of Non-Crystalline Solids, 1982
- Ion implantation effects in glassesRadiation Effects, 1982
- Phosphosilicate glass stabilization of FET devicesProceedings of the IEEE, 1969