Letter to the editor

This publication has 4 references indexed in Scilit:

• Deconvolution methods applied to sputter depth profiles at interfaces
  Thin Solid Films, 1983
• The influence of the simultaneous action of several independent stochastic processes on the crater‐shape during sputter depth profiling
  Surface and Interface Analysis, 1983
• The depth dependence of the depth resolution in sputter profiling
  Surface and Interface Analysis, 1982
• Deconvolution method for composition profiling by Auger sputtering technique
  Surface Science, 1976