Lattice Defects in O⁺ Implanted Tin-Doped Indium Oxide Films

This publication has 18 references indexed in Scilit:

• Large scale and low resistance ITO films formed at high deposition rates
  Thin Solid Films, 1993
• Electrical and structural properties of low resistivity tin-doped indium oxide films
  Journal of Applied Physics, 1992
• Crystallinity and electrical properties of tin-doped indium oxide films deposited by DC magnetron sputtering
  Applied Surface Science, 1991
• Hall-Effect Measurement on Polycrystalline SnO₂ Thin Films
  Japanese Journal of Applied Physics, 1988
• Electrochromic devices for transmissive and reflective light control
  Solar Energy Materials, 1987
• Properties of In2O3: Te films prepared by the spraying method
  Thin Solid Films, 1986
• Electrical properties and defect model of tin-doped indium oxide layers
  Applied Physics A, 1982
• Electrical properties of vacuum-deposited indium oxide and indium tin oxide films
  Thin Solid Films, 1980
• Ionized impurity scattering in degenerate In2O3
  Applied Physics A, 1973
• Neutral Impurity Scattering in Semiconductors
  Physical Review B, 1950