Low-temperature epitaxial growth of AlN films on sapphire by electron cyclotron resonance plasma-assisted chemical vapor deposition
- 31 May 1993
- journal article
- other
- Published by Elsevier in Journal of Crystal Growth
- Vol. 130 (1-2) , 308-312
- https://doi.org/10.1016/0022-0248(93)90867-v
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology (04NP0501)
- Japan Society for the Promotion of Science
This publication has 14 references indexed in Scilit:
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