Measurements of ion-beam dose rate with a calorimetric sensor
- 1 June 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 47 (4) , 462-465
- https://doi.org/10.1016/0168-583x(90)90627-7
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- A calorimeter-Faraday cup to measure energy content of ion beamsVacuum, 1984
- Absolute beam intensity measurements with a 200 watt calorimeterNuclear Instruments and Methods in Physics Research, 1983
- A new dose control technique for ion implantationNuclear Instruments and Methods in Physics Research, 1981
- Dosimetry measurement in ion implantersNuclear Instruments and Methods in Physics Research, 1981
- Dosimetry techniquesRadiation Effects, 1979
- Absolute dosimetry of ion implanted impurities using a calorimetric methodVacuum, 1977
- Ion beam studies Part II: A calorimetric method for ion beam studiesNuclear Instruments and Methods, 1976