A new dose control technique for ion implantation
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1) , 295-303
- https://doi.org/10.1016/0029-554x(81)90158-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- High current dosimetry techniquesRadiation Effects, 1979
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- Features of a high-current implanter and a medium-current implanterJournal of Vacuum Science and Technology, 1976
- Rotating Scan for Ion ImplantationJournal of the Electrochemical Society, 1975