High current dosimetry techniques
- 1 January 1979
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 44 (1-4) , 93-110
- https://doi.org/10.1080/00337577908245983
Abstract
A review of techniques for electrical measurement of high current ion beams is presented. A computer analysis of the secondary-particle current-collection schemes is made for dosimetry-cup configurations commonly used on ion implanters with electrostatic scanning. The design of a dosimetry cup for a high current implanter with mechanical scanning is discussed. Also beam monitoring techniques for uniformity measurements are reviewed.Keywords
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