Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators
Open Access
- 15 July 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 55 (1) , 65-69
- https://doi.org/10.1016/s0924-4247(96)01251-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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