Stress-induced effects in sputtering and surface analysis
- 1 March 1976
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 28 (5) , 244-245
- https://doi.org/10.1063/1.88724
Abstract
The compressive stress gradients induced by relatively energetic ion bombardment in sputtering, for surface analysis and cleaning, are shown to result in the possibility of atom migration and compositional changes. A solution to these problems is proposed.Keywords
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