Experiments on X-ray lithography using synchrotron radiation from the VEPP-2M storage ring
- 1 April 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 208 (1-3) , 393-398
- https://doi.org/10.1016/0167-5087(83)91156-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- X-Ray Silicon Target Preparation for X-Ray Lithographic SystemJapanese Journal of Applied Physics, 1979
- Flash X-ray MicroscopyScience, 1979
- Submicrosecond X-ray lithographyElectronics Letters, 1978
- X-ray lithography by synchrotron radiation of INS–ESJournal of Vacuum Science and Technology, 1978
- X‐ray lithographyPolymer Engineering & Science, 1977
- X-ray lithographyPublished by Springer Nature ,1977
- X-ray replication of masks using the synchrotron radiation produced by the ACO storage ringApplied Physics Letters, 1976