Eigenspannungen, Haftfestigkeit und Verschleißeigenschaften von gesputterten, amorphen Aluminiumoxidschichten
- 1 November 1987
- journal article
- research article
- Published by Wiley in Materialwissenschaft und Werkstofftechnik
- Vol. 18 (11) , 375-380
- https://doi.org/10.1002/mawe.19870181107
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Struktur gesputterter amorpher AluminiumoxidschichtenMaterialwissenschaft und Werkstofftechnik, 1987
- Electrical insulating properties and thermal stability of r.f.-sputtered alumina coatingsThin Solid Films, 1985
- Ion beam sputter deposition of thin insulating layers for applications in highly loaded contactsThin Solid Films, 1983
- Internal stress in sputter-deposited Al2O3 filmsThin Solid Films, 1982
- Internal stress in aluminium oxide, titanium carbide and copper films obtained by planar magnetron sputteringThin Solid Films, 1981