Sodium microsensors based on ISFET/REFET prepared through an ion-implantation process fully compatible with a standard silicon technology
- 1 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 32 (2) , 101-105
- https://doi.org/10.1016/0925-4005(96)80117-1
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Characterization of Na + ‐Sensitive Electrolyte/Oxide/Semiconductor Structures Obtained by Ion ImplantationJournal of the Electrochemical Society, 1996
- Comparison between silicone-rubber membranes and plasticized poly(vinyl chloride) membranes containing calix[4]arene ionophores for sodium ion-sensitive field-effect transistors in applicability to sodium assay in human body fluidsSensors and Actuators B: Chemical, 1994
- An Oxynitride ISFET Modified for Working in a Differential Mode for pH DetectionJournal of the Electrochemical Society, 1994
- Spectroscopic and electrochemical properties of ion-sensing membranes fabricated by ion implantationSensors and Actuators B: Chemical, 1993
- Thin insulator films chemically sensibilized by ion implantation for use in ISFETs: studies on the drift effect in NAS membranesSensors and Actuators B: Chemical, 1992
- Characterization of ion-implanted gate insulator films for use as ion-selective membrane in ISFETsSensors and Actuators B: Chemical, 1992
- Solvent polymeric membranes combined with chemical solid-state sensorsThe Analyst, 1988
- ISFET's with ion-sensitive membranes fabricated by ion implantationIEEE Transactions on Electron Devices, 1988
- The role of buried OH sites in the response mechanism of inorganic-gate pH-sensitive ISFETsSensors and Actuators, 1984
- Preparation of Na+-selective electrodes by ion-implantation of lithium and silicon into single-crystal alumina wafer and its application to the production of ISFETAnalytical and Bioanalytical Chemistry, 1982