Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
- 13 June 2000
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 10 (3) , 322-328
- https://doi.org/10.1088/0960-1317/10/3/304
Abstract
An accelerometer fabricated by a combination of screen printing and silicon micromachining is reported. This is the first device of its kind fabricated in this manner. Details of the finite element model (FEM) of the sensor and its method of fabrication are described. Initial results indicate a sensitivity of 16 pC g-1, which compares very favourably with a sensitivity of 0.15 pC g-1 reported for thin-film devices. Experimental results show a good level of agreement with the FEM results. Analysis of the results highlight the need to further improve the mechanical properties and consistency of the thick-film PZT layer.Keywords
This publication has 9 references indexed in Scilit:
- Thick film PZT/micromachined siliconaccelerometerElectronics Letters, 1999
- Processing of PZT piezoelectric thick films on silicon for microelectromechancial systemsJournal of Micromechanics and Microengineering, 1999
- Fabrication and characterization of a piezoelectric accelerometerJournal of Micromechanics and Microengineering, 1999
- Thick-film printing of PZT onto siliconMaterials Letters, 1997
- A novel micropump design with thick-film piezoelectric actuationMeasurement Science and Technology, 1997
- MicrosensationsIEE Review, 1995
- Preparation of -oriented Lead-Zirconate-Titanate Films by Sol-Gel TechniqueJapanese Journal of Applied Physics, 1993
- R.f. reactive sputtering of zinc oxide films on silicon and SiSiO2TiN substratesSensors and Actuators A: Physical, 1992
- Silicon in mechanical sensorsJournal of Physics E: Scientific Instruments, 1988