Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and Nb substitution
- 30 June 2002
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 5 (2-3) , 123-127
- https://doi.org/10.1016/s1369-8001(02)00092-6
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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