The species dependence of inert gas ion incorporation in the ion-induced deposition of tungsten
- 1 September 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (5) , 2889-2895
- https://doi.org/10.1063/1.371137
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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