Vibrational excitations in a-Si3N4:H(D) alloys
- 30 June 1988
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 21 (18) , 3397-3406
- https://doi.org/10.1088/0022-3719/21/18/006
Abstract
The authors report here the first results of a theoretical study of the vibrational excitations in the amorphous Si3N4 and a-Si3N4:H(D) alloys using a cluster Bethe lattice method. The a-Si3N4 network has a nearest-neighbour tetrahedral coordination of N atoms around the Si atom and a threefold planar coordination of Si atoms around the N atom. The computed phonon density of states for a-Si3N4 and a-Si3N4:H alloys is in very good agreement with the available infrared and Raman data. The study shows the occurrence of the mono- and dihydrides both at the Si and N atoms. Detailed infrared and Raman measurements need to be performed on the a-Si3N4:H alloys for the different concentrations of H atoms, especially in the low-frequency region, to elucidate the microscopic structure of the alloys.Keywords
This publication has 11 references indexed in Scilit:
- Electronic structure of hydrogenated-fluorinateda-Si1−xGexalloysPhysical Review B, 1987
- Infrared and optical study of a-SiN alloysJournal of Non-Crystalline Solids, 1985
- Chemical heterogeneity in off stoichiometry a-SixNyHz from a collective vibrational modes studyJournal of Non-Crystalline Solids, 1985
- Structural properties of a-SiC:H- and a-SiN:H-Alloys from XPS-analyses and IR-absorptionJournal of Non-Crystalline Solids, 1985
- Infrared spectra of amorphous SiNx:H filmsJournal of Non-Crystalline Solids, 1985
- Vibrational excitations in pure and fluorinated silane chainsJournal of Non-Crystalline Solids, 1985
- Nitrogen-bonding environments in glow-discharge—depositedfilmsPhysical Review B, 1983
- Vibrational properties of crystalline and amorphous Ge1−xSixalloysSolid State Communications, 1981
- GeSi alloys: A study of short-range orderPhysical Review B, 1980
- Characterization of Silicon Nitride FilmsJournal of the Electrochemical Society, 1971