Deposition of thin indium oxide film and its application to selective epitaxy for in situ processing
- 1 June 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 246 (1) , 58-64
- https://doi.org/10.1016/0040-6090(94)90732-3
Abstract
No abstract availableKeywords
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