Hydrogen-related Degradation and Recovery Phenomena in Pb(Zr,Ti)O 3 Capacitors with a Platinum Electrode
- 1 March 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (3R)
- https://doi.org/10.1143/jjap.36.1132
Abstract
Pb(Zr,Ti)O3 capacitors with top platinum electrodes area subjected to hydrogen annealing from 300°C to 450°C. Both the remnant polarization and breakdown voltage were drastically degraded after hydrogen annealing, whereas the dielectric constant was found to be relatively stable. Capacitors recovered their characteristics before annealing after re-oxidation treatment. An interfacial degradation model with a platinum-catalysis reduction is proposed to explain these notable degradation phenomena.Keywords
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