Conduction processes in vacuum-deposited films of silicon oxide
- 1 March 1969
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 4 (3) , 259-265
- https://doi.org/10.1007/bf00549926
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
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- Electrode‐Limited to Bulk‐Limited Conduction in Silicon Oxide FilmsPhysica Status Solidi (b), 1967
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- Electrical Conductivity in Evaporated Silicon Oxide FilmsJournal of Applied Physics, 1966
- Non-Ohmic Conduction in Vacuum-Deposited SiO FilmsJapanese Journal of Applied Physics, 1965
- Dielectric Properties and DC Conductivity of Vacuum-Deposited SiO FilmsJapanese Journal of Applied Physics, 1964
- Vacuum deposition of dielectric films for capacitorsVacuum, 1959