Preparation of sapphire substrates for Gas phase GaN epitaxial processes
- 1 January 1977
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 12 (10) , 1105-1110
- https://doi.org/10.1002/crat.19770121016
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Gas-Phase Etching of SapphireJournal of the Electrochemical Society, 1974
- Growth of epitaxial layers of gallium nitride on silicon carbide and corundum substratesJournal of Crystal Growth, 1971
- The Chemical Polishing of Sapphire and MgAl SpinelJournal of the Electrochemical Society, 1971
- Gas Phase Etching of SapphireJournal of the Electrochemical Society, 1968
- Gas Phase Etching of Sapphire with Sulfur FluoridesJournal of the Electrochemical Society, 1967