Experimental evaluation of an electron-beam wobbling method with a compact storage ring
- 14 June 1990
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 23 (6) , 631-636
- https://doi.org/10.1088/0022-3727/23/6/001
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Development Of A Compact Synchrotron Radiation System For X-Ray LithographyOptical Engineering, 1988
- Survey of compact storage rings for X-ray lithographyNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988
- An Electron Undulating Ring Dedicated to VLSI LithographyJapanese Journal of Applied Physics, 1987
- Ion-Clearing System of UVSOR Storage RingJapanese Journal of Applied Physics, 1986