Atomic bonding in amorphous hydrogenated silicon carbide alloys: A statistical thermodynamic approach

Abstract
The free-energy model (FEM) previously developed for predicting the bonding in amorphous covalent alloys has been extended to include tetrahedra, the fundamental structural units in the a-Six Cy Hz alloys under consideration. It is proven that the tetrahedron probabilities P(i) can be obtained by randomly distributing, according to statistics, the bonds predicted by the FEM among the possible Si- and C-centered tetrahedra. The short-range order present in these alloys therefore corresponds, in general, to partial chemical ordering (CO) with a homogeneous dispersion of the bonds among the available tetrahedra. The nature of the CO predicted for these a-Six Cy Hz alloys is shown to vary with alloy composition. For example, Si-C bonds are favored over Si-Si and C-C bonds in stoichiometric alloys, Si-Si and C-H bonds are favored over Si-C and Si-H bonds in Si-rich alloys, while Si-C and C-H bonds are favored over C-C and Si-H bonds in C-rich alloys. Detailed predictions are presented for the bond fractions, tetrahedron probabilities, and tetrahedral and polymeric volume fractions in a-Six C1x alloys and also in a-Six Cy Hz alloys with both high H content and lower H content. In the high-H-content alloys, C is predicted to be present primarily in CH2 and CH3 units, in good agreement with experiment, and a significant polymeric component is predicted to be present. In the lower-H-content alloys, on the other hand, more Si-C bonds and a smaller polymeric component are predicted. It is therefore demonstrated that the H content plays a dominant role in controlling the optical and electronic properties of these technologically important alloys. The simplest way of improving the usefulness of these alloys is to lower the H content, thereby promoting the random bonding of C and H atoms in the amorphous Si network.