Al+ and B+ implantations into 6H-SiC epilayers and application to pn junction diodes
- 1 April 1998
- journal article
- research article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 27 (4) , 358-364
- https://doi.org/10.1007/s11664-998-0415-6
Abstract
No abstract availableKeywords
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- Al and B ion-implantations in 6H- and 3C-SiCJournal of Applied Physics, 1995
- Boron-implanted 6H-SiC diodesApplied Physics Letters, 1993
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