The role of hydrogen in silicon nitride and silicon oxynitride films
- 1 February 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 124 (3-4) , 301-308
- https://doi.org/10.1016/0040-6090(85)90280-9
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Determination of the Refractive Index of Thin Dielectric Films*Journal of the Optical Society of America, 1964