Simple Calculation on Topography of Focused-Ion-Beam Sputtered Surface
- 1 February 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (2A) , L320
- https://doi.org/10.1143/jjap.28.l320
Abstract
An analytical model of surface topography evolution during ion sputtering is applied to investigate the eroded profile in a steady state during scanning focused-ion-beam (FIB) sputtering. Some calculations are carried out to demonstrate the eroded profile under the known parameters, i.e. sputtering yield as a function of ion incident angle, the FIB profile, and the FIB scan speed. The present approach is useful to obtain roughly the characteristics of FIB sputtering such as the erosion rate and the length and gradient angle of the step-like slope formed on the eroded surface.Keywords
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