Overdamped Josephson junctions with Nb/AlOx/Al/AlOx/Nb structure for integrated circuit application

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Abstract
We present characteristics of overdamped Josephson junctions consisting of Nb/AlOx/Al/ AlOx/Nb structures. The junctions were fabricated using a well-developed Nb/AlOx/Nb-junction technology and showed well-defined Josephson characteristics at 4.2 K. The characteristic voltage Vc [the product of the critical current Ic and the effective normal resistance Rn(eff)] of junctions, which determines high-frequency performance of the junction, was in the range of 0.1–0.5 mV, and the critical current density Jc in the range of 102–104 A/cm2. Maximum-to-minimum variations in Ic over a wafer were ±4% for junctions with Vc=0.15 mV and ±13% for junctions with Vc=0.5 mV.