A review of recent work in sub-nanometre displacement measurement using optical and X–ray interferometry
- 15 May 2002
- journal article
- review article
- Published by The Royal Society in Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
- Vol. 360 (1794) , 953-968
- https://doi.org/10.1098/rsta.2001.0976
Abstract
This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.Keywords
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