Abstract
ω-tricosenoic acid in L.B. films undergoes a solid state, lattice controlled polymerization. This molecule exhibits high contrast under short time development when used as an electron-resist in microlithography. This high contrast seems to be due to two factors : the monodispersity of the polymer and the compactness of the film. To check for a relationship between these factors and contrast, a model for the dissolution rate of partially polymerized L.B. films is presented, which includes monodispersity and compactness as basic hypotheses. Since this model is able to fit all the set of experimental results in spite of its crude simplicity and the small number of adjustable parameters, it is believed to actually represent the real dissolution mechanism. The necessity of introducing a long penetration period is an expected consequence of the compact, trans-zigzag structure of the fatty acids. Polymer monodispersity is a second consequence of the model. A possible mechanism for it (stress limited propagation) is presented.