A low-temperature oxygen sensor based on the Si/LaF3/Pt capacitive structure
- 31 October 1992
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 9 (3) , 191-196
- https://doi.org/10.1016/0925-4005(92)80215-j
Abstract
No abstract availableKeywords
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