Laser annealing of ZnO thin films
- 15 November 1984
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 56 (10) , 2943-2947
- https://doi.org/10.1063/1.333835
Abstract
Thermal furnace and CO2 laser annealing experiments on ZnO thin films are reported. Both the refractive index of the films and the effective refractive index of guided optical modes increase with thermal furnace annealing. However, the losses of guided modes increase, too. Laser annealing performed by scanning with a CO2 laser beam does not affect refractive index but produces a marked decrease for guided mode losses.This publication has 12 references indexed in Scilit:
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