Microstructural investigation of droplets in arc-evaporated TiN films
- 1 January 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 63 (1-2) , 123-128
- https://doi.org/10.1016/s0257-8972(05)80016-7
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Microstructures of TiN films grown by various physical vapour deposition techniquesSurface and Coatings Technology, 1991
- Macroparticles on TiN films prepared by the arc ion plating processSurface and Coatings Technology, 1990
- Multiply stripped ion generation in the metal vapor vacuum arcJournal of Applied Physics, 1988
- Ion-beam-induced epitaxial vapor-phase growth: A molecular-dynamics studyPhysical Review B, 1987
- The microstructure of sputter‐deposited coatingsJournal of Vacuum Science & Technology A, 1986
- Cross‐Section preparation for tem of film‐substrate combinations with a large difference in sputtering yieldsJournal of Electron Microscopy Technique, 1986
- Dependence of thin-film microstructure on deposition rate by means of a computer simulationJournal of Applied Physics, 1985
- In Situ Determination of Macroparticle Velocities in a Copper Vacuum ArcIEEE Transactions on Plasma Science, 1983
- Columnar microstructure in vapor-deposited thin filmsThin Solid Films, 1977
- Dubious details of nitrogen diffusion in nitrided titaniumThin Solid Films, 1977