Sputtering yields of gold and tantalum in argon-oxygen mixtures
- 1 October 1970
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 6 (4) , 277-287
- https://doi.org/10.1016/0040-6090(70)90126-4
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Impact Evaporation and Thin Film Growth in a Glow DischargePublished by Elsevier ,1963
- The crystallisation of thin amorphous tantalum oxide films heated in air or vacuo, and the structure of the crystalline oxideActa Crystallographica, 1961