Comparative studies of Mg implants in GaAs in different annealing environments
- 1 May 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 182-183, 609-616
- https://doi.org/10.1016/0029-554x(81)90785-0
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Measurement of High Resistivity Semiconductors Using the van der Pauw MethodReview of Scientific Instruments, 1973
- Mg and Be Ion Implanted GaAsJournal of Applied Physics, 1972