Microlens formation by thin-film deposition with mesh-shaped masks.
- 1 July 1999
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 38 (19) , 4117-4124
- https://doi.org/10.1364/ao.38.004117
Abstract
Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally.Keywords
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