Net and total shallow impurity analysis of silicon by low temperature fourier transform infrared spectroscopy
- 1 September 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 72 (1) , 201-210
- https://doi.org/10.1016/0040-6090(80)90575-1
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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