Growth and Properties of Undoped n-Type ZnSe by Low-Temperature and Low-Pressure OMVPE

Abstract
Undoped ZnSe epitaxial layers have been grown at a temperature as low as 250°C onto (100)GaAs substrates by a low-temperature and low-pressure organometallic vapor-phase epitaxial (OMVPE) technique using dimethylzinc (DMZ) and H2Se as source materials. The epilayers have exhibited strong blue emission and low resistive n-type conductivity. Typical values of the electron concentration n, the resistivity p, and the electron Hall mobility µ are n=8.2×1016 cm-3, p=0.31 Ω·cm, and µ=244 cm2/V·s, respectively.
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