White-beam synchrotron topographic analysis of multi-polytype SiC device configurations
- 14 April 1995
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 28 (4A) , A56-A62
- https://doi.org/10.1088/0022-3727/28/4a/011
Abstract
No abstract availableKeywords
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