A study of the OMVPE growth mechanisms using internal reflectance spectroscopy to examine adsorption of TMGa and NH3 and surface reactions between them
- 1 January 1989
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 18 (1) , 45-51
- https://doi.org/10.1007/bf02655343
Abstract
No abstract availableKeywords
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