Structural investigation of reactively sputtered boron nitride films
- 1 March 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 209 (2) , 155-160
- https://doi.org/10.1016/0040-6090(92)90668-2
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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