Air-bridge microbolometer for far-infrared detection
- 15 January 1984
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (2) , 153-155
- https://doi.org/10.1063/1.94718
Abstract
A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10−11 W(Hz)−1/2. A thermal model is also presented that accurately fits the response of the detector.Keywords
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