R.F.-magnetron-sputtered AlN films for microwave acoustic resonators
- 1 March 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 125 (3-4) , 291-298
- https://doi.org/10.1016/0040-6090(85)90235-4
Abstract
No abstract availableKeywords
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