Excimer laser machining of corner cube structures
- 17 December 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (3) , 388-397
- https://doi.org/10.1088/0960-1317/14/3/011
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Combination of contour and half-tone masks used in laser ablationApplied Surface Science, 2000
- Assembly of micro-optical devices using magnetic actuationSensors and Actuators A: Physical, 1999
- Optical properties of a retroreflecting sheetApplied Optics, 1999
- Excimer laser micromachining and replication of 3D optical surfacesApplied Surface Science, 1998
- Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projectionPublished by SPIE-Intl Soc Optical Eng ,1997
- Precision crystal corner cube arrays for optical gratings formed by (100) silicon planes with selective epitaxial growthApplied Optics, 1996
- Excimer laser machining for the fabrication of analogous microstructuresApplied Surface Science, 1996
- Micromachined corner cube reflectors as a communication linkSensors and Actuators A: Physical, 1995
- A revolving retro-reflective marker for an optical tachometerSensors and Actuators A: Physical, 1990
- Making masters for corner cube reflectorsApplied Optics, 1981