Deposition of new piezoelectric Ta2O5 thin films and their surface acoustic-wave properties
- 1 June 1987
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (11) , 5012-5017
- https://doi.org/10.1063/1.338321
Abstract
A new technique for the deposition of the crystallized Ta2O5 thin films is described. Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc-diode sputtering. Crystalline structure and piezoelectric properties of the Ta2O5 thin film were investigated. Surface acoustic-wave properties, including a phase velocity, coupling coefficient, temperature coefficient of delay, and propagation loss, were measured.This publication has 8 references indexed in Scilit:
- New piezoelectric Ta2O5 thin filmsApplied Physics Letters, 1985
- Sputtered Ta2O5 antireflection coatings for silicon solar cellsThin Solid Films, 1982
- Refractive-index-adjustable SiO2-Ta2O5 films for integrated optical circuitsApplied Physics Letters, 1978
- Optical Propagation in Sheet and Pattern Generated Films of Ta_2O_5Applied Optics, 1971
- Temperature Dependence of Surface Acoustic Wave Velocity on α QuartzJournal of Applied Physics, 1970
- Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit ModelIEEE Transactions on Microwave Theory and Techniques, 1969
- Interaction of Light and Ultrasonic Surface WavesThe Journal of the Acoustical Society of America, 1967
- Structure des Oxides de TantaleJapanese Journal of Applied Physics, 1967