Thermal Effects of Gasses in Rapid Thermal Processing
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Numerical Heat Transfer and Fluid FlowPublished by Taylor & Francis ,2018
- Steady-state thermal uniformity and gas flow patterns in a rapid thermal processing chamberIEEE Transactions on Semiconductor Manufacturing, 1991
- Effect of radiation shield angle on temperature and stress profiles during rapid thermal annealingIEEE Transactions on Semiconductor Manufacturing, 1990
- Thermal and stress analysis of semiconductor wafers in a rapid thermal processing ovenIEEE Transactions on Semiconductor Manufacturing, 1988
- Radiation Heat TransferJournal of Applied Mechanics, 1967