Reflection High-Energy Electron Diffraction Study of the Growth of Ge on the Ge(111) Surface

Publisher Website
Google Scholar
Abstract
Intensity oscillations, spot profiles and rocking curves of the (00) rod in reflection high-energy electron diffraction (RHEED) during the growth of Ge on the Ge(111) surface are investigated under various conditions. Two types of RHEED intensity oscillations with a period of one monolayer have been observed at specific conditions. One type of oscillation observed at a substrate temperature of 180°C is ascribed to the overlapping of the specular reflection and the 333 bulk reflection. The other type of monolayer oscillation observed at a low substrate temperature for a low glancing angle suggests the monolayer mode growth. Rocking curves of the (00) rod have been measured at various stages of growth, which demonstrate the periodic change of the intensity distribution of the rod during growth.