A Phototropic Crystal Growth of β-Ta2O5 by KrF Laser Photolysis of Ta(OCH3)5
- 1 February 1990
- journal article
- research article
- Published by Oxford University Press (OUP) in Chemistry Letters
- Vol. 19 (2) , 177-180
- https://doi.org/10.1246/cl.1990.177
Abstract
Sublimated Ta(OCH3)5 gas was decomposed by KrF excimer laser under the coexistence of helium gas. The deposit obtained was strongly-oriented β-Ta2O5, which had columnar structure. It grew nearly toward the irradiation direction of the laser light.Keywords
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